Central Laboratory of Tsinghua Micro/Nano Technology Research is a part of the Institute of Instrument Science and Technology which belongs to the Department of Precision Instruments and Mechanology (DPIM). The lab gains the edge by providing multiple and integrated disciplines in engineering. Four state-level key disciplines including the DPIM’s instrument science and technology optical engineering, machinery manufacturing and automation, mechanical design and theory, together with the Micro Electronic Mechanical System (MEMS) have all been promoted by the research results achieved by the Institute of Microelectronics, enabling the research in MEMS to reach the advanced standards internationally.

The establishment of the lab intensified our ability in MEMS design, processing, testing and system integration. We strive hard to achieve more breakthroughs in frontier theoretical studies like microscale mechanics, nano-tribology, high efficiency and precision numerical methods. In doing so, we can improve the MEMS platform for precision machining and testing, make advances in key technologies of MEMS systematic projects like micro- accelerometers, micro-gyro, micro-devices, micro-aircraft, micro satellite. Those achievements will contribute to China’s modernization and national defense and finally enable the manufacturing technology and equipment to move towards the development of microscale, high efficiency and high-precision, intelligence.

The laboratory comprises non-destructive testing technology lab, micro/nano satellite lab, simulation design studio, scanning electronic microscope (SEM) room, biochemical analysis laboratory (BAL). Boasting of advanced equipment, the lab also plans to establish design platform, precision process platform and packaging&testing platform of MEMS. The lab has undertaken many key national projects, made progress in the basic theory and technology studies of MEMS as well as achieved theoretical and technological fruits in MEMS device manufacturing.

By establishing the lab, we will create a high-quality, international and well-arranged team for MEMS studies. Meanwhile, we will improve the MEMS education system to create a comprehensive education base that provides undergraduate education, graduate education and high-level research training. In this way, we will be able to provide outstanding technicians and scientists for MEMS industry and research institutes, making Tsinghua an education centre for MEMS professionals both at home and abroad.

Covering over 600m2, the lab is located at the C district of the 1st floor of the building of Department of Precision Instruments and Mechanology.

Main entrance MEMS/NEMS Vacuum test room

MEMS Simulation Lab PIV lab

3-D PIV/Micro-PIV flow system micro-PIV system

Class-1000 ±0.02°C precision constant temperature lab Field-emission environmental scanning electron microscope (ESEM-FEG)